Dry Vacuum Pump : SSH Series
Application : Manufacturing Of Semiconductr,eneralindustry, research and development etc.
Energy saving pump mounting a high performance DCBL motor.
• Economy Power saving effect for approx. Yen 64,000 per year.
• Ecology Reduce CO2 amount of emission of approx 1,400 kg per year.
Being developed as a pioneer of Shinko Seiki'sday pumps, the SSH
series includes robust dry pumps of the screw-rotor type. The pump is
mainly monunted on semiconductor manufacturing equipment and allows
stable exhaust performance required for manufacturing of semiconductors.
The pump controller incorporated inf the pump allows centralized
Note : 1. Only 200V class is available for the motor (50Hz/60Hz).