|Dry Vacuum Pump : SSE1200 Series|
Application: Manufacturing of semiconductor, manufacturing of flat panel display etc.
|The SSE seriex includes exhaust units incorpo-rating a dedicated mechanical booster in the box so as to allow large displacement. The inverter control minimizer energy loss to achieve energy conservation operation.|
The exhaust units of this series are provided with a communication function to enable control in conjunction by connecting a number of units.