Shinko Seiki Dry vacuum pumps SSH Series (Screw type)
Application : Manufacturing Of Semiconductor, Energy Industry, research and development etc.
Energy saving pump mounting a high performance DCBL motor.
- Economy Power saving effect for approx. Yen 64,000 per year.
- Ecology Reduce CO2 amount of emission of approx 1,400 kg per year.
Being developed as a pioneer of Shinko Seiki’s day pumps, the SSH series includes robust dry pumps of the screw-rotor type. The pump is mainly mounted on semiconductor manufacturing equipment and allows stable exhaust performance required for manufacturing of semiconductors. The pump controller incorporated in the pump allows centralized control.