Shinko Vacuum Valve

[High-vacuum valve]

When the disc is opened, conductance is high and leak volume is small, while the pump exhaust rate is hardly reduced.

• The body is made of SS400 + nickel plating, SUS304, etc.
• The seal is made of nitrile rubber, fluororubber, etc.
• The flange is a vacuum flange with VG gasket groove (JIS B2290).
• Amount of leak (checked with a He leak detector in the non-operating state) is 1.3 × 10^-9 Pa cm³/sec or less.